3D particle simulations of plasma-solid interaction: magnetized plasma and a cylindrical cavity

نویسنده

  • Z Pekárek
چکیده

In this contribution we report the results obtained using a newly developed self-consistent fully 3D Particle-In-Cell code for modelling of plasma-solid interaction. The model presented here involves a hollow cylindrical chamber opened to the plasma, with an external magnetic field limiting access of charged particles to the cylindrical wall. This model layout might provide more insight into processes taking place during magnetron deposition of thin films onto porous media. It is also a basis for probe diagnostics in fusion plasma research. The magnetic field is inclined with an angle of either 15◦ or 30◦ with respect to the cylindrical axis. Several different presures of the ambient neutral Ar gas are considered to model the diffusion of ions across the magnetic field in the presence of a solid surface.

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تاریخ انتشار 2007